[labnetwork] Backside Alignment Microscopes

[Kyle Willis]

Hi Jeff,

If its for overlay, you might look at a Suss DSM6/8.   If the front to backside alignment is way off, most qualified services guys have a calibration mask to remove any parallax in the BSA scopes.

Kyle Willis
Kyle at WECpro.com

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________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Jeff McKay <jeffmckay at g.ucla.edu>
Sent: Thursday, 02 July 2026 14:16:40
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Backside Alignment Microscopes

Hello All,

We currently use Karl Suss MA6 for lithography on the backside of 4" InP wafers. It is critical that we have good back to front side alignment, and right now we can only use the MA6 to verify alignment.

Unfortunately there is no scale/camera options for outputting to get quantative data from our alignment.

We are looking for a bench top tool/microscope that would allow us to check alignment after development so that we are getting higher resolution and more quantative results. Does anyone have any recommendations?

Thanks,
Jeff McKay

Process Engineer
Global Communications Semiconductor
Torrance, CA
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