[labnetwork] EBL facility temperature control

[Brown, Devin K]

Thanks to everyone who has filled out the poll so far, just a reminder for those who have not yet had a chance, if you could fill out the brief poll at the following link it would be much appreciated.

https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=dialog

Kind regards-

Devin K. Brown, Ph.D.

Principal Research Engineer

Institute for Matter and Systems

Georgia Institute of Technology

________________________________
From: Brown, Devin K <devin.brown at gatech.edu>
Sent: Tuesday, June 23, 2026 10:14 AM
To: Network Fab <labnetwork at mtl.mit.edu>
Subject: EBL facility temperature control

Dear colleagues-

I have been wanting to know the common situation and actual experience for temperature and humidity control for the installed locations of electron beam lithography systems. I've put together the following poll with just a few basic questions. If you would be so kind to take the poll, it won't take too much time. I would be happy to share the results when finished.

https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=publish-editor

Kind regards-

Devin K. Brown, Ph.D.

Principal Research Engineer

Institute for Matter and Systems

Georgia Institute of Technology

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