[labnetwork] Backside Alignment Microscopes

[Garry J. Bordonaro]

Jeff,

 

It barely qualifies as table-top, but this tool works well for us:

 

Schott IR Inspection Tool

https://www.cnfusers.cornell.edu/node/95

 

 

We also have a Suss DSM8 for measuring front to back alignment to >500nm but it is currently not functioning.  And NOT table top…

 

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Jeff McKay
Sent: Thursday, July 2, 2026 5:17 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Backside Alignment Microscopes

 

Hello All,

 

We currently use Karl Suss MA6 for lithography on the backside of 4" InP wafers. It is critical that we have good back to front side alignment, and right now we can only use the MA6 to verify alignment. 

 

Unfortunately there is no scale/camera options for outputting to get quantative data from our alignment.

 

We are looking for a bench top tool/microscope that would allow us to check alignment after development so that we are getting higher resolution and more quantative results. Does anyone have any recommendations?

 

Thanks,

Jeff McKay

 

Process Engineer

Global Communications Semiconductor 

Torrance, CA

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