[labnetwork] Wet Process Station Exhaust Requirements

[Hope Fa-Kaji]

Apologies for the typo--below should read FPM not CFM.

On Mon, Jul 6, 2026 at 10:44 AM Hope Fa-Kaji <hfakaji at lbl.gov> wrote:

> Hello all,
>
> What standards are your facilities are using for wet bench exhaust and
> where on the bench are your exhaust measurements are taken? We are
> particularly interested in the case of wet stations without a sash located
> inside cleanrooms with vertical air flow.
>
> The consensus from the 2012 thread discussing this topic
> <https://mtl.mit.edu/pipermail/labnetwork/2012-April/000426.html> was a
> minimum face velocity of 80-100 CFM (following ANSI Z9.5 or similar
> requirements for fume hoods).
>
> Is anyone using a different minimum velocity? Alternatively, is anyone
> measuring the capture velocity around the deck openings (i.e. above the
> baths) instead of the front plane of the bench?
>
> I found an old Intel supplier document advising both of these
> modifications but am curious if anyone has them in practice.
>
> [image: Screenshot 2026-07-06 at 10.37.42 AM.png]
>
> Thank you!
> --
> *All the best,*
>
> Hope Fa-Kaji
> Semiconductor Equipment Engineer
> MicroSystems Laboratory
>
>
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