[labnetwork] Wet Process Station Exhaust Requirements

[Hope Fa-Kaji]

Hello all,

What standards are your facilities are using for wet bench exhaust and
where on the bench are your exhaust measurements are taken? We are
particularly interested in the case of wet stations without a sash located
inside cleanrooms with vertical air flow.

The consensus from the 2012 thread discussing this topic
<https://mtl.mit.edu/pipermail/labnetwork/2012-April/000426.html> was a
minimum face velocity of 80-100 CFM (following ANSI Z9.5 or similar
requirements for fume hoods).

Is anyone using a different minimum velocity? Alternatively, is anyone
measuring the capture velocity around the deck openings (i.e. above the
baths) instead of the front plane of the bench?

I found an old Intel supplier document advising both of these modifications
but am curious if anyone has them in practice.

[image: Screenshot 2026-07-06 at 10.37.42 AM.png]

Thank you!
-- 
*All the best,*

Hope Fa-Kaji
Semiconductor Equipment Engineer
MicroSystems Laboratory
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