[labnetwork] YES Eco Clean Plate

[Macdonald, Robert (GE Aerospace, US)]

I am running a YES Eco Clean Asher.

We are running 100mm and 150mm.

There is a plate that sits on the chuck when we swap sizes.

It is an annulus which opening the wafer size.

We are not sure if the plate’s purpose is to protect the chuck, or to help center wafers.

If anyone has experience with this tool would be happy to hear opinions on this.

Thanks,

Rob Macdonald
GE Aerospace microFAB
Niskayuna, NY
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