[labnetwork] Light filtering in photolithography bays

[Nicholas Menounos]

We use recessed 3500k LEDs with UV filter covers.

No reported issues in 9 years.

Best,
Nick Menounos, PE
MIT.nano - Associate Director of Infrastructure
Cell: (508) 932-0938<tel:+15089320938>

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Iulian Codreanu
Sent: Thursday, March 5, 2026 7:55 AM
To: Collins, Deon <deonc69 at illinois.edu>; Cohen, Ana N CTR USARMY DEVCOM ARL (USA) <ana.n.cohen.ctr at army.mil>; labnetwork at mtl.mit.edu; massey21 at llnl.gov
Subject: Re: [labnetwork] Light filtering in photolithography bays

Hi Deon,

I went with the white LEDs + UV filters after evaluating a number of amber LEDs that did not quite filter as expected.



iulian Codreanu, Ph.D.

Director, Nanofabrication Facility

University of Delaware

Harker ISE Lab, Room 163

221 Academy Street

Newark, DE 19716

302-831-2784

https://udnf.udel.edu

On 3/4/2026 5:15 PM, Collins, Deon wrote:
Revisiting this older post.

HMNTL has T-8's currently with UV filters.

Before I pull the trigger on filtered LED replacements, I want to make an inquiry. I am contemplating purchasing nonfiltered LEDs and reusing the UV filters from our CFL bulbs. Being we have 8 photolithography labs; initial conservative savings look to be around $5000.

Superbrightleds T8BDA-30K18A-30PK at 568.50 for a 30 pack
Vs Superbrightleds T8U4-SW5C22-F-25PK at 199.99 for a 25 pack


Thanks in advance.


Deon D. Collins



Director of Facilities

The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


[cid:image001.png at 01DCACA3.03398420]<http://illinois.edu/>

Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.



Life begins at the end of your comfort zone.

                                                                                      Propeck Amanda



________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu><mailto:labnetwork-bounces at mtl.mit.edu> on behalf of Cohen, Ana N CTR USARMY DEVCOM ARL (USA) <ana.n.cohen.ctr at army.mil><mailto:ana.n.cohen.ctr at army.mil>
Sent: Friday, February 17, 2023 9:55 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu> <labnetwork at mtl.mit.edu><mailto:labnetwork at mtl.mit.edu>; massey21 at llnl.gov<mailto:massey21 at llnl.gov> <massey21 at llnl.gov><mailto:massey21 at llnl.gov>
Subject: Re: [labnetwork] Light filtering in photolithography bays

Hi Travis,

A couple years ago we switched our lithography bay fluorescents (T8) to
amber tube LEDS from Super Bright LEDs. The light is more orange than yellow
so took a little adjusting (many users first thought it was darker than
usual), but visibility has actually been much better since we these bulbs
are more stable and we don't end up with dark patches from dead
fluorescents.
https://www.superbrightleds.com/t8-uv-blocking-led-tube-clean-room-18w-1800-
lumens-single-end-dual-end-ballast-bypass-type-b-32w-equivalent-1800k+packam
t-30-Pack

Our fume hoods are still fluorescent bulbs with filters. I've definitely
noticed a degredation over time, but our facilities also have purchased
different filters over the years, so I can't provide much comparison to your
situation. However, it may be that your LEDS are emitting higher wavelengths
than the fluorescents. UV Process has UV filters along with the color tubes
which could be useful
https://www.uvprocess.com/c3/1790-gamtube-and-supertube-filters.html

We don't filter our computer screens because don't notice much light
pollution and we don't keep anything photosensitive nearby long-term, but
you can definitely turn down the brightness and blue saturation on the
monitors. We also have not needed to replace the darker pigment filters on
our doors' windows, but similar to the monitors they are placed sufficiently
distant from the photoresists/coated substrates.

Good luck!
Ana

--
Ana N. Cohen [she/her/hers]
Photolithography Cleanroom Technician
Contractor | General Technical Services, LLC
US Army Research Laboratory
2800 Powder Mill Road, Adelphi, MD 20783
Tel: 301-394-1527
Email: ana.n.cohen.ctr at army.mil<mailto:ana.n.cohen.ctr at army.mil>



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