[labnetwork] Light filtering in photolithography bays

[Prashant Srinivasan]

We have standardized on Super Bright's T8BDA-30K18A. It has been a year 
since they were installed. No complaints from users, failed 
litho-processes or lamps. We used to use sleeves on standard fluorescent 
T8 lamps, but the sleeves degraded both in filtering ability (the amber 
hue lightens significantly) and the plastic turned brittle after a 
couple of years. It was a real pain to replace the sleeves regularly. I 
would never go back to CFL + Sleeves.


On 3/4/2026 2:15 PM, Collins, Deon wrote:
> Revisiting this older post.
>
> HMNTL has T-8's currently with UV filters.
>
> Before I pull the trigger on filtered LED replacements, I want to make 
> an inquiry. I am contemplating purchasing nonfiltered LEDs and reusing 
> the UV filters from our CFL bulbs. Being we have 8 photolithography 
> labs; initial conservative savings look to be around $5000.
>
> Superbrightleds T8BDA-30K18A-30PK at 568.50 for a 30 pack
> Vs Superbrightleds T8U4-SW5C22-F-25PK at 199.99 for a 25 pack
>
>
> Thanks in advance.
>
> *Deon D. Collins*
>
> **
>
>
> /Director of Facilities/
>
> /The Grainger College Of Engineering UIUC/
> Holonyak Micro & Nanotechnology Lab
> 208 N Wright St Rm. 1114 | MC-249
> Urbana, IL 61801
> 217-300-7531 | _deonc69 at illinois.edu_
>
>
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> <http://illinois.edu/>_
>
> /Under the Illinois Freedom of Information Act any written 
> communication to or from university employees regarding university 
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>
> *Life begins at the end of your comfort zone. *
>
> *Propeck Amanda*
>
> ------------------------------------------------------------------------
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of 
> Cohen, Ana N CTR USARMY DEVCOM ARL (USA) <ana.n.cohen.ctr at army.mil>
> *Sent:* Friday, February 17, 2023 9:55 AM
> *To:* labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>; 
> massey21 at llnl.gov <massey21 at llnl.gov>
> *Subject:* Re: [labnetwork] Light filtering in photolithography bays
> Hi Travis,
>
> A couple years ago we switched our lithography bay fluorescents (T8) to
> amber tube LEDS from Super Bright LEDs. The light is more orange than 
> yellow
> so took a little adjusting (many users first thought it was darker than
> usual), but visibility has actually been much better since we these bulbs
> are more stable and we don't end up with dark patches from dead
> fluorescents.
> https://www.superbrightleds.com/t8-uv-blocking-led-tube-clean-room-18w-1800-
> lumens-single-end-dual-end-ballast-bypass-type-b-32w-equivalent-1800k+packam
> t-30-Pack
>
> Our fume hoods are still fluorescent bulbs with filters. I've definitely
> noticed a degredation over time, but our facilities also have purchased
> different filters over the years, so I can't provide much comparison 
> to your
> situation. However, it may be that your LEDS are emitting higher 
> wavelengths
> than the fluorescents. UV Process has UV filters along with the color 
> tubes
> which could be useful
> https://www.uvprocess.com/c3/1790-gamtube-and-supertube-filters.html
>
> We don't filter our computer screens because don't notice much light
> pollution and we don't keep anything photosensitive nearby long-term, but
> you can definitely turn down the brightness and blue saturation on the
> monitors. We also have not needed to replace the darker pigment filters on
> our doors' windows, but similar to the monitors they are placed 
> sufficiently
> distant from the photoresists/coated substrates.
>
> Good luck!
> Ana
>
> --
> Ana N. Cohen [she/her/hers]
> Photolithography Cleanroom Technician
> Contractor | General Technical Services, LLC
> US Army Research Laboratory
> 2800 Powder Mill Road, Adelphi, MD 20783
> Tel: 301-394-1527
> Email: ana.n.cohen.ctr at army.mil
>
>
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-- 
Prashant Srinivasan,
Teaching Cleanroom Engineer
Electrical & Computer Engineering
University of California, Santa Barbara
Santa Barbara, California 93106
https://www.ece.ucsb.edu/department-resources/electronics-shop/tcr
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