[labnetwork] Light filtering in photolithography bays

Thu Mar 5 13:56:46 EST 2026

Deon,

When we converted our fab from fluorescent to LED several years ago we used
the following T8 size LED lamps, and installed yellow sleeves over the ones
that were in our photolithography spaces.  We looked at the yellow LED, but
when we did the testing, and price comparison, there wasn't any difference
in wavelength filtering, and the yellow LED's were about 3 times the cost.
At the time it made way more sense to just use a white LED, and install a
filter tube over the lamp.  That allowed for a lot of flexibility. and
keeps us with only one bulb to have to worry about keeping on hand for
replacement.

The only problems we've had since then is making sure all of our
fluorescent fixtures get converted to single-ended as we change them (we
did all of the lamps in the entire facility as part of this LED push), and
making sure we stay with the same temperature range.

We have some lamps that have been on continuously since May of 2017.
That's over 78,000 hours.

GREEN CREATIVE GREEN 36973 16T8 4F BYP RC LED LAMP (LED lamp, direct wire),
4000K, single ended, 4 foot length

Tarp50 light filter

Thanks,

Dennis Schweiger
University of Michigan/LNF
Facilities
734.647.2055 Ofc

On Wed, Mar 4, 2026 at 8:08 PM Collins, Deon <deonc69 at illinois.edu> wrote:

> Revisiting this older post.
>
> HMNTL has T-8's currently with UV filters.
>
> Before I pull the trigger on filtered LED replacements, I want to make an
> inquiry. I am contemplating purchasing nonfiltered LEDs and reusing the UV
> filters from our CFL bulbs. Being we have 8 photolithography labs; initial
> conservative savings look to be around $5000.
>
> Superbrightleds T8BDA-30K18A-30PK at 568.50 for a 30 pack
> Vs Superbrightleds T8U4-SW5C22-F-25PK at 199.99 for a 25 pack
>
>
> Thanks in advance.
>
> *Deon D. Collins*
>
>
>
>
> *Director of Facilities*
>
> *The Grainger College Of Engineering UIUC*
> Holonyak Micro & Nanotechnology Lab
> 208 N Wright St Rm. 1114 | MC-249
> Urbana, IL 61801
> 217-300-7531 | *deonc69 at illinois.edu <deonc69 at illinois.edu>*
>
>
> *[image:
> https://webtools.illinois.edu/webservices/js/ds/signature_logo.png]
> <http://illinois.edu/>*
>
> *Under the Illinois Freedom of Information Act any written communication
> to or from university employees regarding university business is a public
> record and may be subject to public disclosure. *
>
>
>
> *Life begins at the end of your comfort zone.  *
>
> *
> Propeck Amanda*
>
>
> ------------------------------
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Cohen,
> Ana N CTR USARMY DEVCOM ARL (USA) <ana.n.cohen.ctr at army.mil>
> *Sent:* Friday, February 17, 2023 9:55 AM
> *To:* labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>; massey21 at llnl.gov <
> massey21 at llnl.gov>
> *Subject:* Re: [labnetwork] Light filtering in photolithography bays
>
> Hi Travis,
>
> A couple years ago we switched our lithography bay fluorescents (T8) to
> amber tube LEDS from Super Bright LEDs. The light is more orange than
> yellow
> so took a little adjusting (many users first thought it was darker than
> usual), but visibility has actually been much better since we these bulbs
> are more stable and we don't end up with dark patches from dead
> fluorescents.
>
> https://www.superbrightleds.com/t8-uv-blocking-led-tube-clean-room-18w-1800-
>
> lumens-single-end-dual-end-ballast-bypass-type-b-32w-equivalent-1800k+packam
> t-30-Pack
>
> Our fume hoods are still fluorescent bulbs with filters. I've definitely
> noticed a degredation over time, but our facilities also have purchased
> different filters over the years, so I can't provide much comparison to
> your
> situation. However, it may be that your LEDS are emitting higher
> wavelengths
> than the fluorescents. UV Process has UV filters along with the color tubes
> which could be useful
> https://www.uvprocess.com/c3/1790-gamtube-and-supertube-filters.html
>
> We don't filter our computer screens because don't notice much light
> pollution and we don't keep anything photosensitive nearby long-term, but
> you can definitely turn down the brightness and blue saturation on the
> monitors. We also have not needed to replace the darker pigment filters on
> our doors' windows, but similar to the monitors they are placed
> sufficiently
> distant from the photoresists/coated substrates.
>
> Good luck!
> Ana
>
> --
> Ana N. Cohen [she/her/hers]
> Photolithography Cleanroom Technician
> Contractor | General Technical Services, LLC
> US Army Research Laboratory
> 2800 Powder Mill Road, Adelphi, MD 20783
> Tel: 301-394-1527
> Email: ana.n.cohen.ctr at army.mil
>
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