[labnetwork] CHF3 availability?

[Gila,Brent P]

Hello Jeff,

We tried in 2024 to order a cylinder of CHF3 and were presented with the 
same issue.  I reached out to our university Environmental Health and 
Safety office and they had no idea how to get an allowance for UF.  The 
gas vendors were not helpful either.  I have contacts at PlasmaTherm and 
they were aware of this issue and had no direct replacement gas options.

The movement is away from these gases with high Global Warming Potential 
(GWP) and towards "friendly" gas mixtures.  FAN 
(fluorine/argon/nitrogen) gases are an option.

Here is the link to a 2022 semi.org presentation regarding all this.  
Slide 16 has a list of many of our favorite gases.  SF6 included.
https://www.semi.org/sites/semi.org/files/2022-11/11%20Robert%20Wieland%20Fraunhofer%20NEW.pdf

Here is a publication with a few alternatives to CHF3.
https://pmc.ncbi.nlm.nih.gov/articles/PMC10456486/

New topic area for UGIM this year?  If you discover anything new, please 
share.

Brent


On 3/10/2026 11:37 AM, Jeff Salzmann wrote:
> *[External Email]*
>
> Good morning,
>
> I am looking to purchase some CHF3 for a new RIE system I am having 
> installed here.
>
> Airgas has informed me that, "Also, note that R-23 as of January 1, 
> 2022, CHF3 (R23) has been identified for Phasedown under the EPA AIM 
> Act 
> (https://www.epa.gov/climate-hfcs-reduction/phasedown-hydrofluorocarbons-hfcs-issuing-allowance-allocations 
> ).  The customer will either need to provide us with an allotment from 
> the EPA (in MTeV's) in order to supply, or we can purchase MTeV's on 
> the open market for a significantly higher cost.”
>
> Since that time, I have waited nearly three months for them not to 
> provide a quote.
>
> According to the EPA’s website on HFC “phase down”:
>
> https://www.epa.gov/climate-hfcs-reduction/frequent-questions-phasedown-hydrofluorocarbons#how-allowance-determined 
> <https://www.epa.gov/climate-hfcs-reduction/frequent-questions-phasedown-hydrofluorocarbons#how-allowance-determined>
>
> Application-specific Allowances: Through at least 2030, EPA is issuing 
> application-specific allowances to entities that use HFCs in one of 
> four applications:
>
> 1.
>     A propellant in metered dose inhalers (MDIs)
> 2.
>     Structural composite preformed polyurethane foam for marine use
>     and trailer use
> 3.
>     The etching of semiconductor material or wafers and the cleaning
>     of chemical vapor deposition chambers within the semiconductor
>     manufacturing sector
> 4.
>     Onboard aerospace fire suppression
>
>
> Can anyone offer some guidance to either get the allowance issued or a 
> vendor that can help with this?
>
> Thanks!!!
> Jeff
>
> Jeff Salzmann
>
> Research Assistant Professor of Electrical Engineering
>
> Cleanroom Manager, Shared Instrumentation Laboratories
>
> School of Engineering and Applied Sciences
>
> University at Buffalo, 114A Davis Hall
>
> 105 White Road
>
> Buffalo, NY 14260-2500
>
> Tel: 716.645.2584
>
>
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