[labnetwork] [EXT] Re: Cleanroom Particle Monitors
Huguenin, Carrie - 0835 - MITLL
Huguenin at ll.mit.edu
Tue Mar 24 09:53:07 EDT 2026
Hi Alex-
In my previous life in commercial fabs, we had the Lighthouse system in one of our fabs. It was very well liked. It could detect a failing fan in our HEPA system before it was obvious to our senses, purely because the particle levels would change. Then we’d send a maintenance person to investigate and they’d proactively repair the system. Ten years ago those real-time monitoring systems weren’t particularly expensive and they automated required work that was not generally non-value-added for the organization; the system paid for iteslf rather quickly if you were to calculate the ROI based on human hours saved. I’m not sure if the economics for those systems have changed for the + or – in the interim.
Regards,
-Carrie
S. Carolene Huguenin
Associate Group Leader
Microelectronics Laboratory
ML 201-B
(o): (781) 981-1643
(m): (781) 238-0317
244 Wood Street
Lexington, MA 02420
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Iulian Codreanu
Sent: Tuesday, March 24, 2026 7:22 AM
To: Alex Dixon <agdixon at mines.edu>
Cc: Network Fab <labnetwork at mtl.mit.edu>
Subject: [EXT] Re: [labnetwork] Cleanroom Particle Monitors
Hi Alex, Another option: https: //www. golighthouse. com/en/airborne-particle-counters/ iulian Codreanu, Ph. D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 https: //udnf. udel. edu
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Hi Alex,
Another option:
https://www.golighthouse.com/en/airborne-particle-counters/
iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu
On 3/23/2026 4:21 PM, Alex Dixon wrote:
Hi Everyone, I was wondering what people use for particle measurement systems in their cleanrooms? We are trying to add active particle monitoring to our cleanroom facilities. I was looking at the lasair pro from "Particle Measuring Systems" https://www.pmeasuring.com/ but university procurement is asking me to put together some other options.
-Alex
__________________________________________________________
Alex Dixon, Ph.D. (He/Him)
Lab Manager
Nanofabrication and Thin Film Deposition
Shared Instrument Facility
Colorado School of Mines
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