[labnetwork] Hg Probe Insights

[Kristofor Robert Payer]

Hi All,
We are installing a new Hg probe at MIT.nano and we have had some inquiries about using it to measure in-process samples (returning to other tools). In our early discussions, it was noted that best practice would be to test film properties on monitor wafers/samples and then discard them as “Hg-contaminated” afterward. For those who have Hg probe instruments in their facilities:

  1.
How do you handle samples from a contamination standpoint?
  2.
Does anyone have cleaning methodologies that can remove residual Hg contamination? (Without drain disposal)
  3.
Are there any other best practices that should be considered with Hg probe systems?

We have the ability to perform quantitative testing, but it would be helpful to have a starting point if anyone has experience.

Thanks in advance,
Kris


Kristofor Payer

Assistant Director of Operations

MIT.nano

Massachusetts Institute of Technology

60 Vassar Street

12-4007

Cambridge, MA 02139

617-324-1469

kpayer at mit.edu<mailto:kpayer at mit.edu>


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