[labnetwork] Spinner for spin-on dopants

[Sun, Yong]

Hi Iulian,

We have a fab class using spin-on dopants. The spin-on dopants can be spun in their specific spinner (typically used for teaching class only). The dopant itself is not messy, but after annealing at 800C in a diffusion furnace, it's difficult to remove the remaining dopants in HF without leaving any residue behind.

Please see the lab instruction on diffusion and the spin-on dopants we have used. Hope they're helpful to your class.

Best,
Yong Sun
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Matthew Moneck <mmoneck at andrew.cmu.edu>
Sent: Thursday, May 7, 2026 3:17 PM
To: Iulian Codreanu <codreanu at udel.edu>
Cc: Lab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Spinner for spin-on dopants

Hi Iulian,

We have worked with spin-on dopants from Filmtronics for a number of years both in our cleanroom and in a teaching lab.  The dopants we use contain either boron of phosphorus, and they are essentially a doped spin-on glass.

We have used these materials in spin coaters that were shared with other resists, and we did not experience much of an issue with mess.  However, it should be noted that the solvents used in both (ethanol or ethylene glycol monoethyl ether) may not be compatible with all resists, so we did try to isolate them to one spinner only, and we were diligent about cleaning out the spinner basins after use just to be safe.

We also took precautions to prevent cross-contamination during annealing by making sure to use dedicated chambers (in the case of RTA) or furnace tubes.

Best Regards,

Matt


On Wed, May 6, 2026 at 9:39 AM Iulian Codreanu <codreanu at udel.edu<mailto:codreanu at udel.edu>> wrote:
Dear Colleagues,

I am considering using spin-on dopants for a teaching-type solar cell
project. I am under the impression that these dopants are "messy" and I
am requesting your input on whether they could safely and effectively be
used in one of the our photoresist spinners as opposed to having a
dedicated spinner for this.

Many thanks.

--
iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu<https://udnf.udel.edu/>


_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork


--

--
Matthew T. Moneck, Ph.D
Executive Director, Claire & John Bertucci Nanotechnology Laboratory
Electrical & Computer Engineering | Carnegie Mellon University
5000 Forbes Avenue, Pittsburgh, PA 15213-3890
Phone: 412-268-5430
ece.cmu.edu<http://ece.cmu.edu/>
nanofab.ece.cmu.edu<http://nanofab.ece.cmu.edu/>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20260507/85d97a82/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Lab Instruction - Diffusion.pdf
Type: application/pdf
Size: 573205 bytes
Desc: Lab Instruction - Diffusion.pdf
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20260507/85d97a82/attachment.pdf>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: IMG_1677.jpeg
Type: image/jpeg
Size: 2262430 bytes
Desc: IMG_1677.jpeg
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20260507/85d97a82/attachment.jpeg>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: IMG_1678.jpeg
Type: image/jpeg
Size: 2202655 bytes
Desc: IMG_1678.jpeg
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20260507/85d97a82/attachment-0001.jpeg>