[labnetwork] Spinner for spin-on dopants

[Matthew Moneck]

Hi Iulian,

We have worked with spin-on dopants from Filmtronics for a number of years
both in our cleanroom and in a teaching lab.  The dopants we use contain
either boron of phosphorus, and they are essentially a doped spin-on
glass.

We have used these materials in spin coaters that were shared with
other resists, and we did not experience much of an issue with mess.
However, it should be noted that the solvents used in both (ethanol or
ethylene glycol monoethyl ether) may not be compatible with all resists, so
we did try to isolate them to one spinner only, and we were diligent about
cleaning out the spinner basins after use just to be safe.

We also took precautions to prevent cross-contamination during annealing by
making sure to use dedicated chambers (in the case of RTA) or furnace
tubes.

Best Regards,

Matt


On Wed, May 6, 2026 at 9:39 AM Iulian Codreanu <codreanu at udel.edu> wrote:

> Dear Colleagues,
>
> I am considering using spin-on dopants for a teaching-type solar cell
> project. I am under the impression that these dopants are "messy" and I
> am requesting your input on whether they could safely and effectively be
> used in one of the our photoresist spinners as opposed to having a
> dedicated spinner for this.
>
> Many thanks.
>
> --
> iulian Codreanu, Ph.D.
> Director, Nanofabrication Facility
> University of Delaware
> Harker ISE Lab, Room 163
> 221 Academy Street
> Newark, DE 19716
> 302-831-2784
> https://udnf.udel.edu
>
>
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-- 

--
Matthew T. Moneck, Ph.D
Executive Director, Claire & John Bertucci Nanotechnology Laboratory
Electrical & Computer Engineering | Carnegie Mellon University
5000 Forbes Avenue, Pittsburgh, PA 15213-3890
Phone: 412-268-5430
ece.cmu.edu
nanofab.ece.cmu.edu
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