[labnetwork] Oxford PlasmaPro 100

[Paolini, Steven]

Try RF VII in New Jersey. I have worked with Steve Barber for over 40 years. He is an RF generator expert.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Mike Maghiar
Sent: Thursday, October 01, 2026 2:06 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Oxford PlasmaPro 100

Hi all,

Our PlasmaPro 100 ICP RF unit has failed, and I was wondering if anyone knows a trusted source for repairs like this.

The unit is deprecated, and the solution available through Oxford is only to purchase a refurbished unit.

Thank you,
Mike Maghiar
CNI Cleanroom Director
CEPSR 1020
(212) 854-3032
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20261001/b1ef0339/attachment.html>