[labnetwork] Oxford PlasmaPro 100

[Christophe Clément]

Hi
Last time we had to repair our ICP RF generator on our Plasmalab system 100, we went with Advanced Energy. The cost was about 3000 $, flat rate
Best
Christophe


Joel Duran,



Technical Support Representative

Email: technical.support at aei.com<mailto:technical.support at aei.com>

Phone: 1-800-446-9167 option 2

[cid:image001.jpg at 01D051E2.124895F0]

1625 Sharp Point Drive

Fort Collins, CO 80525



Christophe Clément

Professionnel de recherche

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM) www.<http://www.gcmlab.ca/>polymtl.ca/gcmlab

Ecole Polytechnique de Montréal www.polymtl.ca<http://www.polymtl.ca/>

Département de génie physique

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4

christophe.clement at polymtl.ca<mailto:christophe.clement at polymtl.ca>

514 340 4711 #2417

Fax : 514 340 5195

________________________________
De : Mike Maghiar <rmm2263 at columbia.edu>
Envoyé : 1 octobre 2026 14:06
À : labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Objet : [labnetwork] Oxford PlasmaPro 100

Hi all,

Our PlasmaPro 100 ICP RF unit has failed, and I was wondering if anyone knows a trusted source for repairs like this.

The unit is deprecated, and the solution available through Oxford is only to purchase a refurbished unit.

Thank you,
Mike Maghiar
CNI Cleanroom Director
CEPSR 1020
(212) 854-3032
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