[labnetwork] SIROF deposition

[Sam Norris]

Tom,

The Cornell Center for Materials Research (CCMR) has a sputter tool with an Ir target and can do reactive sputtering with O2. They also offer contract services to deposit on wafers if the parameters are provided, though I'm not sure about accommodating 150 mm substrates. Steve Kriske (kriske at cornell.edu) is the best person to contact there.

Sam


Samantha Norris, Ph.D.

Product Manager

Axoft, Inc. | www.axoft.us<https://urldefense.com/v3/__http:/www.axoft.us__;!!Imp-zVk!Wh1NX8Fn55ForO5MwLL5wWBJuGLQbHDOMrMZQY7Zri3MRBJXkX5Gbu9SWpLTOsUZ4zp1DVsdU7l31fA$>

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________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Thomas Daunais <tdaunais at hawksemiconductor.com>
Sent: Wednesday, August 26, 2026 10:26 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] SIROF deposition

Hello Labnetwork,
We are looking for someone who can deposit sputtered iridium oxide films on three to six photoresist-patterned 150 mm substrates. The timing on this project is ~2 months from now. Does anyone in this network have this capability or know of a vendor who could help us?
Thanks!
-Tom


Thomas Daunais, PhD
Lead process engineer / Managing Member
Hawk Semiconductor LLC
hawksemiconductor.com<http://hawksemiconductor.com>

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