[labnetwork] Help with SPTS (Xactix) E1 XeF2 etcher

Gila,Brent P bgila at ufl.edu
Tue Sep 15 15:53:54 EDT 2026


Hello everyone,

We inherited a SPTS E1 (formerly Xactix E1) and it is missing the 
computer and communication cable.  KLA/SPTS was finally able to locate 
the cable part number for us but they are silent on the 
computer/software support.  Is anyone willing to share the software or 
clone a HD for us?  We also need the computer and comm card information 
as well.  The tool we have has the "continuous mode" option added if 
that makes a difference.  But at this point I will take whatever version 
we can get.

ClassOne was somewhat helpful but their SPTS engineers were not familiar 
with this model, so I am assuming it is the first wave of Xactix tools 
under the SPTS label.

Thank you,
Brent
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