[labnetwork] Help with SPTS (Xactix) E1 XeF2 etcher
Gila,Brent P
bgila at ufl.edu
Tue Sep 15 15:53:54 EDT 2026
Hello everyone,
We inherited a SPTS E1 (formerly Xactix E1) and it is missing the
computer and communication cable. KLA/SPTS was finally able to locate
the cable part number for us but they are silent on the
computer/software support. Is anyone willing to share the software or
clone a HD for us? We also need the computer and comm card information
as well. The tool we have has the "continuous mode" option added if
that makes a difference. But at this point I will take whatever version
we can get.
ClassOne was somewhat helpful but their SPTS engineers were not familiar
with this model, so I am assuming it is the first wave of Xactix tools
under the SPTS label.
Thank you,
Brent
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