[labnetwork] HF/BOE Wet Bench Configuration – Dip & Rinse Tanks

[Dylan Bartusiak]

Hello all,
We are looking at purchasing a new 48" HF/BOE wet bench and I was hoping to get some feedback from other facilities on integrated HF dip tanks and DI rinse/cascade tanks.
We are a relatively low-volume shared university facility, and most users process only a few wafers or small samples at a time. I am trying to decide whether integrated tanks would provide enough benefit over a more flexible flat-deck bench using smaller PFA/PP labware.
For facilities with integrated HF/BOE dip tanks and rinse tanks, I would be interested in your experience with things like:

  *   Typical bath volumes and how frequently the tanks actually get used
  *   Bath lifetime and whether chemistry is discarded due to age/contamination rather than depletion
  *   Whether the chemical and DI water consumption feels excessive for low-volume processing
  *   Cascade/overflow rinse versus quick-dump rinse, and whether you find either worthwhile for small batches
  *   Whether users generally prefer the integrated tanks or still use beakers on the deck
  *   Maintenance, cleaning, contamination, or waste-management issues you didn't anticipate
  *   Anything you would configure differently if purchasing a new HF bench today

We have enough flexibility at this point to choose between a mostly flat-deck station, integrated HF dip/rinse tanks, or some combination of the two, so any experience from other shared nanofabs would be greatly appreciated.

Thanks much,
Dylan Bartusiak
Facility/Lab Manager
COSINC Fabrication<https://www.colorado.edu/facility/cosinc/>
University of Colorado Boulder
303-492-2656 | LinkedIn<https://www.linkedin.com/in/dylanbartusiak/>

If your work used COSINC resources, please acknowledge:
COSINC, RRID:SCR_018985

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