[labnetwork] Cross-contamination guidance for shared RTA

[Basil Chew]

Dear Labnetwork,

We recently installed a shared Unitemp RTP-150 in our cleanroom, and we have users who want to anneal III-V materials, metals, and Si quantum devices. Since we only have this single RTA, we're looking for guidance on preventing cross-contamination between these very different material classes.

Does anyone have a handling or cleaning procedure between runs of dissimilar materials (e.g., dedicated boats/carriers, purge cycles, chamber bake-outs)? Do you restrict certain materials? Our main concern is our Si quantum devices, which require anneals at 1000°C. We don't run CMOS, so we're less worried about mobile-ion contamination and more concerned about metal/III-V diffusion affecting device performance. Any insight from labs running multi-material RTAs in a single chamber would be greatly appreciated.


Tool config:
SiC-coated graphite susceptor with quartz tray, single-wafer batch, N2/forming gas/O2, max temp 1200°C/30s.


Thank you,
Basil Chew
University of Central Florida
https://cleanrooms.research.ucf.edu
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