[labnetwork] Question: is a must to have CO2 fire suppression system for Polypro wet benches with heating ability

[Mac Hathaway]

Hey there,

At Harvard CNS, we have fire-suppression on our metal (solvent + 
photoresist) benches (single big CO2 bottle on each), and no fire 
suppression on poly (acid/base/developer) benches.

Quartz heated tanks usually means RCA clean or Piranha etch, i.e. acids, 
so less fire risk.  At least here, no suppression would be required.  
Local codes may vary, of course...


Mac Hathaway
Harvard CNS



Li, Jianchao wrote:
>
> Hi guys,
>
>  
>
> We bought some used polypro wet benches which have heated quartz 
> tanks. I am wondering whether it ‘s a must to have CO2 fire 
> suppression system for them.
>
>  
>
> Or sprinkler system from the cleanroom will be enough.
>
>  
>
> Thanks,
>
>  
>
> J.C.
>
>  
>
> Jianchao (J.C.) Li  Ph.D.
>
> Nanofabrication Facilities Manager
>
> UNT Discovery Park
>
> 3940 North Elm, Suite A-101
>
> Denton, TX 76203-5017
>
> voice: (940) 369-5318 <tel:%28940%29%20369-5318>
>
> e-mail: _jianchao.li at unt.edu <mailto:jianchao.li at unt.edu>_
>
>  
>
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