[labnetwork] SVG track coaters

[John Shott]

Leif:

Like, Rick, we at Stanford University also have a collection of SVG coat 
and develop tracks and have also used AZN and AIO for support.  A third 
company that we us for support of these tracks is Pico Track 
(www.picotrack.com) that is also located in Silicon Valley.

It is probably worth discussing which series of SVG system you are 
considering.  We have the older 8600 series in use in our lab (two 
dual-track coat systems and one dual-track develop system) ... which are 
still supported by the previously mentioned third-party companies.  My 
guess is that some universities and research labs also have the somewhat 
newer (but still pretty old ....) 8800 series.

As all of our experience is with the 8600 series, I'm not qualified to 
comment on differences in reliability, performance, or availability of 
support between the 8600 and 8800 series.  I believe that we have been 
generally pretty happy with the performance of the 8600 series ... 
although all track systems seem to have a fair amount of cleaning and 
support involved that increases if you plan to use high-viscosity 
resists for thick layers.  Getting long life out of pumps used for 
high-viscosity resists seem to be an ongoing challenge (and expense ...).

If there are more specific questions, I'm confident that I can get our 
folks that support these tracks on a daily basis to provide more 
detailed comments.

Good luck,

John


On 8/23/2012 8:44 AM, Morrison, Richard H., Jr. wrote:
>
> HI Leif,
>
> Here at Draper we used refurbished SVG systems. Uptime is >90% and COO 
> is very low. We purchased 3 coat tracks and 3 develop tracks for the 
> following vendors:
>
> AZN Track Inc. (2 coat tracks and 2 dev tracks)
>
> 1081 Memorex Dr
>
> Santa Clara, CA  95050
>
> Tel: (408) 982-6102
>
> AIO International Corporation   (1 coat track and 1 dev track)
>
> 1938 Junction Avenue
>
> San Jose, CA  95131
>
> Ph: 408.586.7667
>
> Both companies are good and responsive. Both have the same pricing. We 
> started with AIO with a person named Jim Grambow, he left AIO and went 
> to AZN so we followed him to AZN.
>
> Rick
>
> Draper Laboratory
>
> Group Leader Microfabrication Operations
>
> 555 Technology Square
>
> Cambridge Ma, 02139-3563
>
> www.draper.com
>
> rmorrison at draper.com
>
> W 617-258-3420
>
> C 508-930-3461
>

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