[labnetwork] Hydrogen Generation

[Rizik]

Hi Tom,

 

It was nice meeting you during the UGIM event. I am still at my promise to
visit with you in Mass. When using H2 generators, please make sure that
distribution piping form the generator to the tool is all welded. Mechanical
connections should be in exhausted enclosures and equipped with LEL sensors
interlocked with the generator. 

 

Good luck.

 

Rizik Michael, PE

Principal

Integrated Engineering Services

Office: +408 261 3500, Ext. 201

Cell:      +408 718 0927

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Ferraguto, Thomas
Sent: Wednesday, July 18, 2012 4:54 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Hydrogen Generation

 

Colleagues,

 

We're in the process of designing our gas cabinet and abatement layout for
our fab.

 

I just met with the sales representative from Proton and we're looking at
Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)

 

I can't find any holes in the argument for Hydrogen generation for ~$12k,
when a gas cabinet will cost me ~$20K

 

Does anyone have any thoughts on this unit or Hydrogen generation in general
? (primarily for PECVD)

 

Thanks.

 

 

Thomas S. Ferraguto

ETIC Clean Room Director

University of Massachusetts Lowell

600 Suffolk Street 456C

Lowell MA 01854-5120

978-934-1809 land

617-755-0910 mobile

 

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