[labnetwork] BCL3 - Gas Line Heaters and Protocols

[Fouad Karouta]

Dear Dean,



At ANFF ACT Node we use BCl3 in our ICP system. Here follows the way we installed it:

1-      The cylinder is located in an individual exhausted gas cabinet located outside the lab in a dedicated gas shed. The SS tubing going to the ICP tool is argon welded (single line) and is about 10m long. No other appendages are used between the gas panel in the gas cabinet and the gaspod of the tool.

2-      We have a low pressure (secondary side) pressure regulator with a reading of -4PSI (maybe the gauge is faulty). From the panel the SS tubing is heated at 30°C.

3-      We monitor the gas through three BCl3 sensors (from Bionics): one sampling the exhaust of the gas cabinet, one sampling the tool gaspod (exhaust) and one monitoring the open air around the system. Also we do have a shared gas sensor (with Cl2) to monitor the exhaust of the dry scrubber (Clean Systems).



Hope this is helpful.

Regards, Fouad

*********************************
Manager ANFF ACT Node
Research School of Physics and Engineering
Australian National University
ACT 0200, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au






-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter
Sent: Tuesday, 27 August 2013 5:10 AM
To: <labnetwork at mtl.mit.edu>
Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols



Hello,



AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.



We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.



These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.



So, we are seeking a benchmark from existing facilities that use BCL3.



Anyone care to volunteer to explain their installation and operating/safety protocols?



Thanks



--

Dean A. Sutter

Associate Director,

Research Operations and Industry Engagements



dean.sutter at ien.gatech.edu<mailto:dean.sutter at ien.gatech.edu>

404 894 3847 - Office

404 558 1844 - Cell

www.ien.gatech.edu<http://www.ien.gatech.edu>







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