[labnetwork] TEOS supplier

[Aebersold,Julia W.]

We purchased our canister from Air Products and the heating/delivery system is on our Oxford Plasmalab 100 system of which Oxford designed.

Cheers!

Julia Aebersold, Ph.D.
MNTC Cleanroom Manager
Shumaker Research Building, Room 233
2210 South Brook Street
University of Louisville
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr.
Sent: Monday, December 2, 2013 9:03 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] TEOS supplier

Hi Everyone,

I am adding TEOS to my PECVD tool and I am looking for vendor recommendations on TEOS suppliers and the temperature controlled heaters.

Thanks in advance for your help.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com<http://www.draper.com>
rmorrison at draper.com<mailto:rmorrison at draper.com>
W 617-258-3420
C 508-930-3461

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