[labnetwork] TEOS supplier

[John Shott]

Rick:

We use TEOS in a 500 cc quartz bubbler from Air Products (I don't know 
if it is still called the Schumacher division).  We also use their 
temperature control and liquid level alarm unit.  I think that is one of 
the products in their Vapor Guard series.

Let me know if you need any more detailed information ... I can probably 
dig up the specific product number and/or price for the TEOS bubblers 
that we use.

Good luck,

John

On 12/2/2013 6:02 AM, Morrison, Richard H., Jr. wrote:
>
> Hi Everyone,
>
> I am adding TEOS to my PECVD tool and I am looking for vendor 
> recommendations on TEOS suppliers and the temperature controlled heaters.
>
> Thanks in advance for your help.
>
> Rick
>

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