[labnetwork] Tegal 803 Operation Manual

[Stephen CS Howe]

Dear Sirs,

This guy in Arizona was doing refurbs on TEGAL last time I spoke to him.
When you contact him, let him know it was me who sent you his way:-

  Web:  http://www.glowresearch.org/   |   E-mail :  gordonwhit at cox.net
gordonwhitlock at glowresearch.org

12014 S. 35th Ct. Phoenix, AZ.  USA  85044  |   Phone: 480-621-8405  |
Cell: 480-710-6469  |  Fax: 480-893-2076

If you need any help, let me know.
I may be able to dig up a manual.
However, I don't really do much with TEGAL. It's not my area of
speciality.
We normally charge $500 per manual, as we have to cover costs.

If anyone is looking for old manuals, I have a few listed here, but not
any for TEGAL:-

http://www.fabsurplus.com/sdi_catalog/salesItemList.do?listTypeId=61


Yours sincerely,

Stephen Howe 
Company Owner
SDI Fabsurplus Group

 +1 830 388 1071 (Mobile)
+39 335 710 7756 (Italy Mobile)
Skype: Stephencshowe

WWW.FABSURPLUS.COM

Japan-Italy-Ireland-USA

Contact us now to buy and sell used equipment 
and enjoy the benefits of cost-saving. 


PS I am also looking for the following:-

Axcelis Optima HDX
Axcelis GSD VHE
AMAT 9500 XR 100 mm implanter disk
BIORAD QS 2200
DNS SS80-BW
Ebara FREX 200 for Cu
HITACHI CG4100
KLA RS 55
KLA THERMAWAVE OP 7341
KLA HRP 240
KLA HRP 340
KLA SP1 DLS
KLA ARCHER 10
KLA ASET F5X WITH SMIF
Lam 9400 8 inch, with dsie module
Lam alliance A6 HPT 4 CHAMBERS
METRYX MENTOR OC23
Nanometrics 9000i
Nextest Magnum
NOVELLUS C1 200 MM
NOVELLUS C2 DUAL SEQUEL ("as is")
PRI Pod stocker, track and transporter cars, 8 inch SMIF
Panasonic HT122
SPTS PEGASUS
TEL ALPHA 8s nitride
TEL DRM Unity M with 3 chambers CA DRM2
VARIAN Visiion 200


On Wed, 2013-02-06 at 10:24 +1100, Fouad Karouta wrote:
> Dear Parker,
> 
>  
> 
> We have here a Tegal 901e with a manual. If you think this might be of
> any help let me know.
> 
> Regards, Fouad
> 
>  
> 
> *********************************
> 
> Facility Manager ANFF ACT Node
> 
> Research School of Physics and Engineering
> 
> Australian National University
> 
> ACT 0200, Canberra, Australia
> 
> Tel: + 61 2 6125 7174
> 
> Mob: + 61 451 046 412
> 
> Email: fouad.karouta at anu.edu.au
> 
>  
> 
> From: labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Parker Gould
> Sent: Wednesday, 6 February 2013 3:54 AM
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] Tegal 803 Operation Manual
> 
>  
> 
> Hello all,
> 
>  
> 
> 
> Our group has recently obtained an old Tegal 803 plasma etcher, but
> unfortunately it came with very little documentation.  We've been told
> that an Operation Manual exists, but our attempts to locate one from
> several vendors and from Tegal/SPTS have been fruitless so far.  
> 
> 
>  
> 
> 
> If anyone knows about a manual for the 803, or know someone who might
> be able to locate one, we would greatly appreciate it.
> 
> 
>  
> 
> 
> Thank you,
> 
> 
> Parker Gould
> 
> 
>  
> 
> 
> Schmidt Group Lab
> 
> 
> MTL, MIT
> 
> 
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