[labnetwork] CMP pads storage

[Michael Khbeis]

Christophe,

There are a substantial amount of details regarding the operation and maintenance of a Strasbaugh 6EC and CMP in general.  I can give you a few highlights and point you to a valuable resource, but feel free to ask me more specific questions as I had run a 6EC for the majority of 10 years and learned quite a bit along the way.  

First, always store CMP pads laying flat.  Do not stand the box on end.  I invested in multiple pad tables (removable anodized aluminum carrier) and swapped tables when changing from a SUBA IV to an IC-1000 k-groove/SUBA IV stack pad.  The former for fine polish, the latter for metal/oxide CMP.  When not in use, cover with the original plastic backing sheet and a spare table cover.  They should be kept damp, but not soaked. Same for the VIPR polishing head.  I would keep a small container and place the head in it with a little water when not in use.

For facilities DI feed of course, stable compressed air, and slurry feeds.  The slurry health maintenance is the most problematic area of R&D volume CMP.  Without maintaining a proper humidification, avoiding shearing (e.g. peristaltic pumps), rapid pH swings, etc. the slurry will tend to agglomerate and cause scratching defects.  I worked extensively with Axus Technologies in Tempe, AZ to develop a custom slurry health monitoring system that would keep our slurries in suspension for weeks.  Until we employed this system, it was a challenge to get consistent results.  Also, we were challenged in quality control of incoming slurry and obvious changes in chemistry/inconsistencies by the second tier distributors.  

Please feel free to contact me for more specific questions and concerns.

Best regards,

Dr. Michael Khbeis
Associate Director
Microfabrication Facility (MFF)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
http://www.engr.washington.edu/mff/



On Feb 18, 2013, at 2:00 PM, Christophe Clément wrote:

> Hi everyone,
>  
> We, at polytechnic School of Montreal, are going to buy a refurbished CMP tools for our microfabrication lab: Strasbaugh 6EC.
> That will be our first experience with CMP. We’ve been told that we have to keep our different pads, as soon as they are utilized, under wet condition in a special cabinet.
>  
> Some of you have maybe experience with such cabinet, if you can advice us regarding the design, size, water flow rate, how the pad are oriented (standing up or in a drawer...), that will be really appreciated!
> Also, if some of you has this tools, could you please describe utilities  that need the tools? Such as DI water system, Slurry’s canister, recirculation pump...
>  
> Thank you for your help!
>  
> Christophe Clément
> Technicien laboratoire
> Laboratoire de microfabrication (LMF)
> Groupe des Couches Minces (GCM) www.gcmlab.ca
> Ecole Polytechnique de Montréal www.polymtl.ca
> Département de génie physique
>  
> * 2900 Boulevard Edouard Monpetit
> Pavillon JAB
> Campus de l'Université de Montréal
> Montréal (Québec) H3T 1J4
> 
> 8 christophe.clement at polymtl.ca
> ( 514 340 4711 # 2417
>  
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
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