[labnetwork] Fe in an ALD

[Warren McKenzie]

Dear Colleagues, 

 

Does anyone have any experience depositing pure iron in an atomic layer
deposition system? Our supplier has been acquired and we are having trouble
identifying precursors or recipes.

 

Our system is a CambridgeNanotech Fiji200.

 

Regards, 

Warren

 

 

Dr Warren McKenzie   

BE PhD MCom

 

Business Development Manager - Australian National Fabrication Facility
(ANFF).

 

Level 3 Newton Building 

The University of New South Wales

Sydney NSW 2052

AUSTRALIA

 

Ph: +61 400 059 509

Web:  <http://www.anff.org.au/> www.anff.org.au

Email:  <mailto:Warren.McKenzie at unsw.edu.au> Warren.McKenzie at anff.org.au

 

ANFF_logo_col_150_rgb

 

 

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