[labnetwork] 100% Silane Bottle Changing

[Tom Britton]

Hi Laura,

I've asked our Operations Manager write a "Silane Cylinder Change Out Procedure" that we can send to you. Our Operations Manager, Troy Reese, was the Facilities Manager for ON Semiconductor before he came to us recently, and will be transcribing the procedure he developed while at ON Semi.

For any other questions you may have regarding gas delivery and abatement issues, I invite you, or anyone on the labnetwork to submit questions to our "Ask an Expert" section of the "Knowledge Center" on our website. This is a Free service where the questions are presented to known industry experts (Facilities Managers, A&E Engineers, UHP Contractors, etc.), so you can trust the information you receive is sound.

Here is the link:

http://www.criticalsystemsinc.com/knowledge-center.html

I should have this procedure for you shortly.

Have a great day,

Tom Britton
Director of Sales
Critical Systems, Inc.
7000 W. Victory Road
Boise, ID 83709
Direct: 208-890-1417
Shop:   877-572-5515
www.criticalsystemsinc.com<http://www.criticalsystemsinc.com/>

    "World Leader in UHP Reconditioned
 Gas Delivery & Abatement Technologies"

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Laura Malatto
Sent: Tuesday, June 11, 2013 6:16 AM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] 100% Silane Bottle Changing

Dear All,

Information for manipulation of 2% Silane bottle will also be appreciated!. We are a research group and is the first time we will work with silane. We are installing a PECVD, and we are deciding between 100% silane and 2% silane/N2. We will probably select low concentration as it is less dangerous.
Any recomendation / link / book will be very appreciated!

Many thanks, Laura



_____________________________________________

Ing. Laura Malatto

Jefe de Laboratorio

Procesos Microelectrónicos

INTI-Micro y Nanoelectrónica del Bicentenario (CMNB)

PTM - Ed. 42

Buenos Aires - Argentina

TEL:(+5411) 4724 6430

FAX:(+5411) 4754 5194

_____________________________________________

0800 444 4004 | www.inti.gob.ar<http://www.inti.gob.ar>
El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribió:
We are hooking up a new polysilicon tube and are working with 100% Silane.  I am seeking information on protocol and standard operating procedures (SOP's) on how other groups and institutions perform this the process of changing their Silane bottle and leak checks.  We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively.

A written response to my e-mail is fine, but links to sites with official protocol and SOP's would be preferred.

Cheers!

Julia Aebersold, Ph.D.
MNTC Cleanroom Manager
Shumaker Research Building, Room 233
2210 South Brook Street
University of Louisville
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/





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