[labnetwork] 100% Silane Bottle Changing

[Laura Malatto]

Dear All,

Information for manipulation of 2% Silane bottle will also be 
appreciated!. We are a research group and is the first time we will work 
with silane. We are installing a PECVD, and we are deciding between 100% 
silane and 2% silane/N2. We will probably select low concentration as it 
is less dangerous.
Any recomendation / link / book will be very appreciated!

Many thanks, Laura

_____________________________________________
Ing. Laura Malatto
Jefe de Laboratorio
Procesos Microelectrónicos
INTI-Micro y Nanoelectrónica del Bicentenario (CMNB)
PTM - Ed. 42
Buenos Aires - Argentina
TEL:(+5411) 4724 6430
FAX:(+5411) 4754 5194
_____________________________________________
0800 444 4004 | www.inti.gob.ar

El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribió:
>
> We are hooking up a new polysilicon tube and are working with 100% 
> Silane.  I am seeking information on protocol and standard operating 
> procedures (SOP's) on how other groups and institutions perform this 
> the process of changing their Silane bottle and leak checks.  We have 
> our gas cabinet information, but due to the dangerous nature of this 
> gas more I would like to gather information from other folks that have 
> worked with this gas extensively.
>
> A written response to my e-mail is fine, but links to sites with 
> official protocol and SOP's would be preferred.
>
> Cheers!
>
> Julia Aebersold, Ph.D.
>
> MNTC Cleanroom Manager
>
> Shumaker Research Building, Room 233
>
> 2210 South Brook Street
>
> University of Louisville
>
> Louisville, KY  40292
>
> 502-852-1572
>
> http://louisville.edu/micronano/**
>
>
>
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