[labnetwork] ambient gas detection for bulkheaded tools

[Dennis Schweiger]

Iulian,

here at UofMichigan, we're not sampling in any of the breathing air spaces
directly for the clean room.  Any time we've tried that, the results were
inconclusive, and ineffective.  We just move too much air around.  We are
sampling in some of the more "static" spaces, subfab, hallways in front of,
and behind, the clean room.  Typically all of our gas detection is done in
the exhausted enclosures.  That's where the breakable connections are, and
we're constantly pulling fab air into them.  One of the things we are doing
is looking for gases in cabinets that wouldn't have that gas there, in
effect sampling the fab air coming into the enclosures.  For example, in an
Ammonia cabinet, we might be looking for BCl3, HBr, Cl2, DCS, and hydrides,
in addition to the amines for Ammonia.

Dennis

734.647.2055 Ofc

"People can be divided into 3 groups - those that make things happen, those
that watch things happen, and those that wonder what happened."  Within
which group do you belong?


On Wed, Jun 19, 2013 at 4:43 PM, Iulian Codreanu <codreanu at udel.edu> wrote:

> Hi Dennis.
>
> Since I have to purchase the tools I cannot give definite answers on the
> first two questions.
>
> 1) I hope that all of them will be loadlocked but I have to allow for the
> possibility that some of them will not be.
>
> 2) The chamber could be on either side.
>
> 3) Low side wall (12" opening above floor) return.
>
> Thank you for your help.
>
> Iulian
>
> iulian Codreanu, Ph.D.
> Director of Operations, UD Nanofab
> 149 Evans Hall
> Newark, DE 19716
> 302-831-2784
>
> On 6/19/2013 4:10 PM, Dennis Schweiger wrote:
>
>> Iulian,
>>
>> 1) Are your tools load locked?
>>
>> 2) Which side of the wall is the process chamber on?
>>
>> 3) Is your cleanroom raised floor, or low side wall, return?
>>
>> Thanks,
>>
>> Dennis
>> 586.531.3030 Cell
>>
>> On Jun 19, 2013, at 4:05 PM, Iulian Codreanu <codreanu at udel.edu> wrote:
>>
>>  Dear Colleagues,
>>>
>>> I am trying to figure out how the handle the detection of hazardous
>>> gases in the ambient when part of the tool is in the chase and part in the
>>> bay.  The connection between the tool and the line(s) carrying the gas(es)
>>> would be in the chase so it would make sense to monitor that area.  What
>>> are your thoughts on providing detectors on the bay side of the wall as
>>> well?
>>>
>>> Thank you very much for your help.
>>>
>>> Iulian
>>>
>>> --
>>> iulian Codreanu, Ph.D.
>>> Director of Operations, UD Nanofab
>>> 149 Evans Hall
>>> Newark, DE 19716
>>> 302-831-2784
>>>
>>>
>>> ______________________________**_________________
>>> labnetwork mailing list
>>> labnetwork at mtl.mit.edu
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>>>
>>
>
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