[labnetwork] ambient gas detection for bulkheaded tools

[Morrison, Richard H., Jr.]

Hi Iulian,

When we have a bulk-head tool we have gas sensors at the load station, vacuum pump exhaust and the area where the gases enter the tool and/or the cabinet area where the gas lines run. Most tools exhaust the space where the gas line runs so we will monitor that exhaust flow.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu
Sent: Wednesday, June 19, 2013 12:53 PM
To: Fab Network
Subject: [labnetwork] ambient gas detection for bulkheaded tools

Dear Colleagues,

I am trying to figure out how the handle the detection of hazardous gases in the ambient when part of the tool is in the chase and part in the bay.  The connection between the tool and the line(s) carrying the
gas(es) would be in the chase so it would make sense to monitor that area.  What are your thoughts on providing detectors on the bay side of the wall as well?

Thank you very much for your help.

Iulian

--
iulian Codreanu, Ph.D.
Director of Operations, UD Nanofab
149 Evans Hall
Newark, DE 19716
302-831-2784


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