[labnetwork] Hafnium in e-beam

[Fouad Karouta]

Hi all,

 

We have received a request from a user who wants to deposit Hf in our e-beam
evaporator. So far we only have available in the system: Al, Ti, Ni, Ge, Pt,
Au, Pd, Cr and it is mainly used for contacting III-V semiconductors. 

 

I wonder to share possible experience of someone who has deposited Hf in an
e-beam evaporator and whether it can raise any concerns.

 

Thanks, 

Fouad Karouta

 

*********************************

Facility Manager ANFF ACT Node

Research School of Physics and Engineering

Australian National University

ACT 0200, Canberra, Australia

Tel: + 61 2 6125 7174

Mob: + 61 451 046 412

Email: fouad.karouta at anu.edu.au

 

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