[labnetwork] Titanium hazard

[Scott Blondell]

Rick,

We've seen this problem with platinum in our e-gun evaporator. As a result, we no longer use IPA or other flammables on tool specific chamber cleans.
The chamber interiors are wiped down dry. Education of our users and restricting higher-risk chamber cleaning to staff members has further reduced the threat.

Our solvent waste is segregated from other lab waste by depositing in metal solvent cans with self-closing lids. That's not to say a solvent-wetted wipe from someone else's work
wouldn't ignite when exposed to metal-laden wipes improperly added to the metal can. The potential risk is minimized, however, by creating different waste streams and avoiding
the solvent cleaning whenever possible.

Scott P. Blondell
Facilities Manager
Rochester Institute of Technology
Semiconductor & Microsystems Fabrication Laboratory<http://www.smfl.rit.edu/>
82 Lomb Memorial Dr.
Bldg. 17-2519
Rochester, NY 14623

585 738-4073 c
585 475-2171 o
585 475-5041 f
spb1699 at rit.edu<mailto:spb1699 at rit.edu>
www.smfl.rit.edu<http://www.smfl.rit.edu>

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From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr.
Sent: Monday, May 06, 2013 9:50 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Titanium hazard

Hi Everyone,

Last week one of the staff was wiping off some evaporator parts that were covered with Titanium metal. He was using texwipes soaked with IPA. He tossed the texwipes in the trash then accidentally dropped some wipes saturated with IPA on top of them and a fire started. It self extinguished after 1 minute but it melted the bottom of a plastic trash can.

Have any of you had that happen or something similar? Needless to say this is very alarming and I need to understand what could have caused this and develop a corrective action plan.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com<http://www.draper.com>
rmorrison at draper.com<mailto:rmorrison at draper.com>
W 617-258-3420
C 508-930-3461

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