[labnetwork] Span gauge replacements for gas cabinets

Gregg Cure gregg.cure at gmail.com
Mon Oct 13 13:46:38 EDT 2014


Hello,
We have older (circa 1992) Air Products GasGuard GG450 single and dual
controller gas cabinets.
We are using them for SiH4, DCS, PH3 balance SiH4 for various LPCVD
processes.

The Span pressure gauges in the pigtails and VMBs are showing their age and
a few of them have failed, or are no longer able to be calibrated. These
gauge transducers are either in the own weldments connected to the lines or
connected to the lines via VCRs. One gauge is an analog visual unit on the
secondary side of the regulator with an integral transducer that sends a
signal to the controller.

It seems that Span is no longer a viable entity. Does anyone know of a 3rd
party company that sources replacements for these transducers?

Thanks,
Gregg Cure`

-- 
Gregg D. Cure`
The University of Arizona
Arizona Research Laboratories
Nano Fabrication and Processing Center
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987
Cell: 520.307.2760
Fax: 520.626.7877
Website: http://mfc.engr.arizona.edu
Website: http://www.arl.arizona.edu/
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20141013/18409b24/attachment.html>


More information about the labnetwork mailing list