[labnetwork] Metal Targets Final thickness

[Kamal Yadav]

Dear All,

Please let me know how do you know when you need to replace your metal
targets in a sputtering system. In a recent incident, we went little too
far may be and the back material [Cu] got sputtered and contaminated the
chamber. We have 4" and 2" round targets where a inner ring forms, which is
the thinnest.

If you follow any policy or methodology that would be great to know.

-- 
Thanks,
Kamal Yadav
Sr. Process Technologist
IITBNF, EE Department, Annexe,
IIT Bombay, Powai
Mumbai 400076
Internal: 4435
Cell: 7506144798
Email: kamal.yadav at gmail.com, kamalyadav at ee.iitb.ac.in
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