[labnetwork] Metal Targets Final thickness

[Gupta, Su]

Dear Kamal:

You can measure the erosion groove with a depth gauge to see how close it is getting to punch-through. Otherwise you have to go by experience on the number of kilowatt-hours for a particular target and cathode type. When it is getting close to punch-through, you can observe the plasma, which will change to bright blue when you start sputtering copper. You should bond your tagets to a copper backing plate so that you avoid sputtering the target.

Best wishes,
Su Gupta

Dr. Subhadra Gupta
Director, UA Micro-Fabrication Facility
Professor, Metallurgical and Materials Engineering
Adjunct, Electrical and Computer Engineering
University of Alabama
Tuscaloosa, AL 35487
sgupta at eng.ua.edu<mailto:sgupta at eng.ua.edu>
(205) 348-4272

________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav [kamal.yadav at gmail.com]
Sent: Friday, October 17, 2014 6:36 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Metal Targets Final thickness

Dear All,

Please let me know how do you know when you need to replace your metal targets in a sputtering system. In a recent incident, we went little too far may be and the back material [Cu] got sputtered and contaminated the chamber. We have 4" and 2" round targets where a inner ring forms, which is the thinnest.

If you follow any policy or methodology that would be great to know.

--
Thanks,
Kamal Yadav
Sr. Process Technologist
IITBNF, EE Department, Annexe,
IIT Bombay, Powai
Mumbai 400076
Internal: 4435
Cell: 7506144798
Email: kamal.yadav at gmail.com<mailto:kamal.yadav at gmail.com>, kamalyadav at ee.iitb.ac.in<mailto:kamalyadav at ee.iitb.ac.in>