[labnetwork] Cleaning of SS chambers with Acetic Acid

[Paolini, Steven]

Kamal,
   My concern is of the black material. Copper oxide is usually greenish and I don’t think it would form if you were not doing reactive sputtering with O2. Sputtering targets, particularly gold ones, are bonded to the copper with indium which is grey-black. Indium is used for its low temperature melting point and high thermal conductivity. I would send a sample of the material (on a wipe) for analysis before planning a cleaning strategy.
Steve Paolini
Equipment Dood
Harvard University Center for Nanoscale systems.

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kamal Yadav
Sent: Thursday, September 18, 2014 2:12 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cleaning of SS chambers with Acetic Acid

Dear All,

Recently our gold metal target got completely consumed during the run in the sputter and the metal underneath, which is copper, got sputtered instead. It may have happened few times, as target is fixed and hard to reach usually for a look before sputtering.

This made the entire chamber looks black, and dirty. I believe copper oxide coating must be there. After this the metal resistivities are coming in ohm-cm, as we believe some redeposition may be happening.

I want to clean the chamber using diluted acetic acid [4% only] which removes copper oxides. Any other recommendation to clean SS chambers and hope this may be ok?. Or any other suggestion to the observation.

Thanks a lot!

--
Thanks,
Kamal Yadav
Sr. Process Technologist
IITBNF, EE Department, Annexe,
IIT Bombay, Powai
Mumbai 400076
Internal: 4435
Cell: +91-7506144798
Email: kamal.yadav at gmail.com<mailto:kamal.yadav at gmail.com>, kamalyadav at ee.iitb.ac.in<mailto:kamalyadav at ee.iitb.ac.in>
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