[labnetwork] HF vapor etch

[Jun Li, Mr]

Hi Rick,

FYI, only on my own experience,  about 10yrs ago, I used Primaxx  (now SPTS) 1st cluster VHF system, and as well as their single wafer tool.  The process results meet our need.

And Fouad,
I think it is good to have sensor or detector to monitor contents,  just to give you peace of mind.  As I recalled, at that time, it is a pretty new technology, while We worked together with the  manufacturer for process development and hardware improvement.  We did detect HF residual content around atmosphere on the single wafer etch system once open the chamber door.
Best -JL


From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Fouad Karouta
Sent: December-04-15 11:28 AM
To: Christophe Clément; Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] HF vapor etch

Hi Rick and Christophe,

Sorry that I can't give an advice about a manufacturer but I have a question around the installation of such a system. At ANU we do have a system (not sure of the brand but it looks like the Idonus system) and our local H&S office does not allow the use of it in a fume hood unless the exhaust line is adequately wet scrubbed. Hence I wonder if you can share the installation information and whether the fume hood is wet-scrubbed before releasing the vapours to outside atmosphere.
Also is it recommended to put a sensor on the scrubber outlet to monitor the fumes content?

Thanks,
Fouad Karouta

*********************************
Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
Australian National University
ACT 0200, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
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From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Christophe Clément
Sent: Friday, December 4, 2015 11:36 PM
To: Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] HF vapor etch

Hi Richard
Here at Polytechnique Montreal, we have an Idonus HF vapor phase etcher.
Consult the tool at http://www.idonus.com/
Best
Christophe

Christophe Clément
Technicien laboratoire
Laboratoire de microfabrication (LMF)
Groupe des Couches Minces (GCM) www.gcmlab.ca<http://www.gcmlab.ca>
Ecole Polytechnique de Montréal www.polymtl.ca<http://www.polymtl.ca/>
Département de génie physique
* 2900 Boulevard Edouard Monpetit
Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4

* christophe.clement at polymtl.ca<mailto:christophe.clement at polymtl.ca>
* 514 340 4711
Fax : 514 340 4711 # 2417


De : Morrison, Richard H., Jr. [mailto:rmorrison at draper.com]
Envoyé : 3 décembre 2015 13:21
À : labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Objet : [labnetwork] HF vapor etch

Hi Folks,

I am  looking for a HF vapor release tool, I see that OAI and SPTS are the 2 manufactures out there, any recommendations or other suppliers?

thanks in advance

Rick


Draper
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

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rmorrison at draper.com<mailto:rmorrison at draper.com>
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