[labnetwork] Cambridge ALD Precursor Vendor

[Shivakumar Bhaskaran]

I have been using Strem Chemicals and Sigma Aldrich. Strem chemicals are flexible in filling in any type of cylinders.

With all the conversation that I am following, I don't have experience in transferring TMA from the bottle to the ALD cylinders. But other precursor materials I was able to transfer to the cylinders.

Do you guys have any procedure on how you transfer the TMA in glove box. Due to the pyrophoric property, I am worried that TMA might explode if not handled in the correct method, I do have heard accidents happened when using TMA in glove box.

--Thanks
--Shiva


Shivakumar Bhaskaran
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/





From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Hathaway, Malcolm
Sent: Thursday, February 12, 2015 12:02 PM
To: Mark Heiden; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cambridge ALD Precursor Vendor

Hi Mark,

Echoing the comments from others...

Strem Chemical of Newburyport, MA is our preferred vendor for most of our precursors, including TMA.  They have it in "Cambridge" style cylinders.

As it happens, we fill our own, with a glove box.  Empty cylinders can be purchased in 3 pieces (cylinder, VCR weldment, and VCR nut) from Swagelok, for much cheaper than Strem and Sigma will sell them for.  We just have our gas plumbing guys (New England Orbital) do a quick orbital weld and test them, and we're good to go, for about... $150-$200, as I recall...

Mac
Harvard CNS
________________________________
From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [labnetwork-bounces at mtl.mit.edu] on behalf of Mark Heiden [mheiden at engr.ucr.edu]
Sent: Wednesday, February 11, 2015 6:11 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cambridge ALD Precursor Vendor
Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich?

We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable..

Thanks in advance,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20150212/30e59ee1/attachment.html>