[labnetwork] Cambridge ALD Precursor Vendor

[Mac Hathaway]

Hello All,

Given that many readers of this list-server are not familiar with some 
of these materials, let me point out that most ALD precursors are 
moisture sensitive (decomposes, smolders, "goes bad" in contact with 
room air) as they are intended to react quickly, typically with water, 
or other oxidizers.  Some, like TMA (trimethyl aluminum, for Al2O3) and 
DEZ (diethyl zinc, for ZnO) are pyrophoric, and /will /burst into flame 
if exposed to air.

While some precursors can, without injury, be transferred in a regular 
fume hood, I don't do this anymore, since they can still decompose to 
some extent, without actually killing you.  Others, don't even try it, 
or the bad day will happen right then and there.

That said, I will email regarding transfer techniques in a later post, 
as I must run for the train just now!


Mac

Mac Hathaway

Senior Process and Systems Engineer

Harvard Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA02138

617-495-9012


On 2/12/2015 4:37 PM, Shivakumar Bhaskaran wrote:
>
> I have been using Strem Chemicals and Sigma Aldrich. Strem chemicals 
> are flexible in filling in any type of cylinders.
>
> With all the conversation that I am following, I don't have experience 
> in transferring TMA from the bottle to the ALD cylinders. But other 
> precursor materials I was able to transfer to the cylinders.
>
> Do you guys have any procedure on how you transfer the TMA in glove 
> box. Due to the pyrophoric property, I am worried that TMA might 
> explode if not handled in the correct method, I do have heard 
> accidents happened when using TMA in glove box.
>
> --Thanks
>
> --Shiva
>
> Shivakumar Bhaskaran
>
> Searle CleanRoom Manager
>
> The University of Chicago
>
> 5735 S.Ellis, Room 032
>
> Chicago-60637
>
> Ph:773-795-2297
>
> https://searle-cleanroom.uchicago.edu/
>
> *From:* labnetwork-bounces at mtl.mit.edu 
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Hathaway, Malcolm
> *Sent:* Thursday, February 12, 2015 12:02 PM
> *To:* Mark Heiden; labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] Cambridge ALD Precursor Vendor
>
> Hi Mark,
>
> Echoing the comments from others...
>
> Strem Chemical of Newburyport, MA is our preferred vendor for most of 
> our precursors, including TMA.  They have it in "Cambridge" style 
> cylinders.
>
> As it happens, we fill our own, with a glove box.  Empty cylinders can 
> be purchased in 3 pieces (cylinder, VCR weldment, and VCR nut) from 
> Swagelok, for much cheaper than Strem and Sigma will sell them for.  
> We just have our gas plumbing guys (New England Orbital) do a quick 
> orbital weld and test them, and we're good to go, for about... 
> $150-$200, as I recall...
>
> Mac
> Harvard CNS
>
> ------------------------------------------------------------------------
>
> *From:*labnetwork-bounces at mtl.mit.edu 
> <mailto:labnetwork-bounces at mtl.mit.edu> 
> [labnetwork-bounces at mtl.mit.edu] on behalf of Mark Heiden 
> [mheiden at engr.ucr.edu]
> *Sent:* Wednesday, February 11, 2015 6:11 PM
> *To:* labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Cambridge ALD Precursor Vendor
>
> Has anyone found an alternate vendor for precursors packaged for 
> Cambridge Labs ALD systems besides Sigma Aldrich?
>
> We currently have a delivery date for a standard aluminum (TMAH) 
> cartridge that is in June 2015. Not acceptable..
>
> Thanks in advance,
>
> Mark Heiden
>
> NanoFab Cleanroom Manager
>
> Center for Nanoscale Science and Engineering
>
> University of California, Riverside
>
> 951-827-2551
>
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