[labnetwork] Suggestions for interlocking mask aligners

[CHAD EICHFELD]

Hello Vito,
We interlocked our Suss-Microtec MA6 by interupting the mask vacuum sensor.  I prefer this over the mask vacuum solenoid or shutting the tool off.  

Thanks,
Chad

--
Chad Eichfeld, PhD
Facilites Lead, Nanofabritication Lab
Materials Research Institute
The Pennsylvania State University
cme133 at psu.edu

From: Vito Logiudice <vito.logiudice at uwaterloo.ca>
Sent: Oct 26, 2015 5:53 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Suggestions for interlocking mask aligners

Dear Colleagues,

I would appreciate hearing how you may have interlocked the mask aligners in your respective facilities. In our particular case we have a Suss-Microtec MA6 aligner and we are struggling to identify a parameter that can be interlocked without causing the system additional wear and tear. Any insights would be appreciated. Thank you.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca
Website: https://fab.qnc.uwaterloo.ca

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