[labnetwork] Suggestions for interlocking mask aligners

[Paolini, Steven]

Vito,
   When we were faced with some situations like this, we always look to block a function that will not cause an alarm on the system. In the case of contact aligners, I would put a solenoid valve on the air line that opens the shutter. If your interlock system just provides dry contacts, you will have to use a relay and separate power source to operate it.
Steve Paolini
Equipment Dood
Harvard Center for Nanoscale Systems

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: Monday, October 26, 2015 4:43 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Suggestions for interlocking mask aligners

Dear Colleagues,

I would appreciate hearing how you may have interlocked the mask aligners in your respective facilities. In our particular case we have a Suss-Microtec MA6 aligner and we are struggling to identify a parameter that can be interlocked without causing the system additional wear and tear. Any insights would be appreciated. Thank you.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca<https://urldefense.proofpoint.com/v2/url?u=https-3A__fab.qnc.uwaterloo.ca&d=CwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=JBLB6qHiWO8yeqC39SH95uOiCB8DgrJDUmJD9XLZbyk&s=YY6II-7ryKy-84wkPWLu0PYIHIy6ozbdzrL0770beB8&e=>

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