[labnetwork] need help with photolithography

[Leif Johansen]

Hello Rick,

At DTU Danchip we have a Canon FPA-3000 EX4 DUV stepper with a KrF excimer laser at 248 nm wavelength which is set up to handle 150 mm wafers. The nominal resolution limit specified by Canon is 250 nm, but we have obtained 160 nm for straight lines and spaces. The exact resolution limit is very dependent on the actual pattern and, of course, also on the resist thickness.

Best regards,
Leif

Leif S. Johansen

Head of Operations

DTU Danchip



Technical University of Denmark

[http://www.dtu.dk/images/DTU_email_logo_01.gif]

Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713
Mobile +45 25348992

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>





From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr.
Sent: 27. januar 2016 14:39
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] need help with photolithography

HI,

I am working on a project that requires photolith at 100nm, I have access to an E-Beam but I was wondering if anybody has DUV stepper for 150mm wafers working at 100nm line space that Draper could use.

Thanks in advance.

Rick


Draper
Principal  Member of the Technical Staff
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com<http://www.draper.com>
rmorrison at draper.com<mailto:rmorrison at draper.com>
W 617-258-3420
C 508-930-3461

________________________________
Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
________________________________
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20160128/5778dd49/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.gif
Type: image/gif
Size: 1055 bytes
Desc: image001.gif
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20160128/5778dd49/attachment.gif>