[labnetwork] Lithium Niobate photolithography

[Michael Call]

I'm having an issue with lithium niobate substrates sticking to the mask
during alignment/exposure.  I'm using a Karl Suss MA6 contact aligner.  I
am being very careful not to thermally shock the substrate  during cleaning
and PR coating.  The wafer was at room temperature when the substrate
bonded to the mask.  I think now that it may be contact pressure that
causes the static bonding to the mask.  I'm just wondering if anyone else
has run into this issue and may have found a solution.

Thanks,

-- 
Mike Call
Research Engineer
UMaine LASST
207-581-3382
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