[labnetwork] Pegasus - Rapier Esc question

Tue Jun 14 14:15:42 EDT 2016

David,

Our 2009 Pegasus with 150 mm TDESC typically runs 40-100 mT/min leak up at 10 Torr, 10.5-12 sccm He.
Our warning is at 125 and alarm is at 150.

  - Jim
NIST Boulder Microfabrication Facility

On Jun 13, 2016, at 12:03 PM, LaFleur, David W <dlafleur at cns.fas.harvard.edu<mailto:dlafleur at cns.fas.harvard.edu>> wrote:

To Engineers who maintain Pegasus – Rapier Systems with Esc

Where do  you set your 15 Torr leak up rate pass/fail limit for the Esc. Does anyone have success in achieving the factory spec of 50mt/min on a 150mm chuck for 15 torr @15degC ?
What is your max flow you like to see for 15 Torr?
Thanks in advance.

David LaFleur
Equipment Engineer
Harvard University
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