[labnetwork] Cleaning of cold trap from DRIE system

[Steve Pritchett]

Hi Lino,
I have used the LN2 method to clean out a bellows on a DRIE system. It did
cause the deposits to flake off with ends capped and shaking. Per safety
instruction we did this in a fume hood and disposed of deposits as hazardous
waste due to toxic S2F10 etch byproducts. In hind sight if my time is worth
anything it was not very cost effective. I just didn't have a spare bellows
on-hand and time was a consideration.
Good luck,
Steve Pritchett
Sr Process Eng.
Utah nanofab
Ph: 801-587-0684

From:  "Lino Eugene, Dr" <lino.eugene at mcgill.ca>
Date:  Monday, June 20, 2016 1:50 PM
To:  "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
Subject:  [labnetwork] Cleaning of cold trap from DRIE system

Dear colleagues,
 
I would to know if someone has experience with cleaning of cold trap used in
DRIE system. 
 
I am thinking of burning the coating in an oven but I don¹t have the setup
here. Any name of company doing that is welcome.
 
Thanks in advance,
____________________________________________________________________________
___
Lino EUGENE, Ph.D., Jr. Eng.
Research assistant
McGill Nanotools - Microfab
 
Mcgill University
Rutherford Physics Building - Room 016
3600 University Street
Montreal (Quebec) Canada
H3A 2T8
 
Phone : 514 398 7329
Fax : 514 398 8434
E-mail : lino.eugene at mcgill.ca <mailto:lino.eugene at mcgill.ca>
Website : www.mcgill.ca/microfab/ <www.mcgill.ca/microfab/>
 
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