[labnetwork] Sputtering AuSn

[Jugessur, Aju S]

Hi,

I have a user would like to sputter 2-3 micron thick AuSn using our Intlvac Sputter coater.
Does anyone have experience with this process and can also comment on any contamination issues that might cause problems for other processes?
The sputterer is currently used to coat Al, SiN, SiO.

If you could also suggest other deposition techniques that will work to coat AuSn.


Thanks for your help.

Regards
Aju









Aju Jugessur Ph.D.
Director, University of Iowa Microfabrication Facility
Professor (Adj.), Physics and Astronomy
OSTC, Iowa Advanced Technology Labs
University of Iowa

205 N. Madison St
Iowa City, IA 52242
319 -353-2342
aju-jugessur at uiowa.edu
http://ostc.uiowa.edu/uimf
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