[labnetwork] CO2 purity for CPD?

Fri Oct 28 04:18:59 EDT 2016

Dear LabNetwork,

I would like to investigate what purity of CO2 is being used for Critical Point Drying (CPD) of MEMS in various labs. Could I please ask for a reply with a comment if you are using CPD? Did anyone investigate if there are significant benefits of using  5N over 3N purity of CO2?

Cheers,
Marius

Mariusz Martyniuk
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Associate Professor, ANFF-WA Managing Director
Microelectronics Research Group
School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018
The University of Western Australia
35 Stirling Highway, Crawley WA 6009, Australia<%20%20>
Tel: +61 8 6488 1905<tel:+61%208%206488%201905>, Fax: +61 8 6488 1095<tel:+61%208%206488%201095>
Secretary Tel: +61 8 6488 3801<tel:+61%208%206488%203801>, Rm 1.73, http://www.mrg.uwa.edu.au/
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